http://www.lithoguru.com/textbook/index.html
My friend Chris Mack just published another book on Lithography. Fundamental Principles of Optical Lithography. Check it out. It promises to be the reference for lithographers.
Fundamental Principles of Optical Lithography: The Science of Microfabrication by Chris Mack
Chris is actually a really cool guy with a nice blog over at LithoGuru.com. I recommend the book highly.
